摘要

材料技术2019:使用微波大气压等离子体制备石墨烯基材料- Mineo Hiramatsu, Meijo大学，日本

作者(年代):Mineo一品”

基于石墨烯的材料，如碳纳米管(CNT)和石墨烯本身，由于其新兴的应用而引起了广泛的关注。石墨烯基材料可以通过几种等离子体增强化学气相沉积(PECVD)技术在加热基底上合成。例如，在远程等离子体构型下，通过低压PECVD在Cu和Ni上形成平面石墨烯。然而，过量的碳前驱体通量导致过饱和，离子轰击导致缺陷。以往采用微波激发的非平衡大气压等离子体源合成碳纳米管，其电子密度为~1015 cm-3，电子温度为~1 eV。与传统的低压高密度等离子体相比，这种等离子体的自由基量估计要大几个数量级，因此在实现新材料加工方面具有很大的潜力。此外，高压操作可以消除离子轰击对生长表面的影响。本文将微波激发常压等离子体He/H2/CH4混合物应用于石墨烯基材料的合成。大气压PECVD系统原理图如图1所示。微波(2.45 GHz)从沉积室的顶部传播到微缝电极。 The micro-slit electrode width is 0.2 mm. Formation of plane graphene was carried out on Cu substrate for 10- 300 sec at microwave power of 100 W, total pressure of 1 atm and substrate temperature of about 700 Ë??C. In spite of the localized plasma shape, graphene was formed uniformly on the whole substrate. Moreover, the number of graphene layers did not increase even in the increase of formation period. Results indicated that the self-limiting growth of few-layer graphene could be attained on the Cu substrate by the supply of long-lived hydrocarbon radicals without ion bombardment using atmospheric pressure plasma.